Kippenberg, TobiasPfeiffer, Martin Hubert PeterKordts, Arne2017-05-112017-05-112017-05-112016https://infoscience.epfl.ch/handle/20.500.14299/137237A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.patentUS10191215US201632774357221860