Jaecklin, V. P.Linder, C.de Rooij, N. F.Moret, J.-M.2009-05-122009-05-122009-05-12199310.1016/0924-4247(93)80185-Jhttps://infoscience.epfl.ch/handle/20.500.14299/39440Comb Actuators for XY-Microstagestext::journal::journal article::research article