Herzig, Hans Peter2012-09-132012-09-132012-09-132012https://infoscience.epfl.ch/handle/20.500.14299/85346Micro-optics describes a family of elements and systems fabricated by modern micromachining. Optical structures with nearly arbitrary shapes and dimensions down to the nanometer can be realized offering a large degree of freedom for the design. The progress in novel light sources, detectors, materials and technology enable new opportunities and challenges for micro-optics and nanoscale photonics.micro-opticsnano-opticstext::conference output::conference proceedings::conference paper