Cremer, J. F.Briand, D.van der Vlist, W.de Boer, C.de Rooij, N. F.Zandbergen, H. W.Sarro, P. M.2009-05-122009-05-122009-05-12200510.1109/ICSENS.2005.1597703https://infoscience.epfl.ch/handle/20.500.14299/39169MEMS Hotplates with TiN as a Heater Materialtext::conference output::conference proceedings::conference paper