Salt, G.Märki, I.Gautsch, S.Schädelin, F.Staufer, U.Herzig, H. P.2009-04-222009-04-222009-04-22200310.1109/OMEMS.2003.1233490https://infoscience.epfl.ch/handle/20.500.14299/37897Photonic crystal waveguide characterisation for MEMS applicationstext::conference output::conference proceedings::conference paper