Abelé, N.Fritschi, R.Boucart, K.Casset, F.Ancey, P.Ionescu, A. M.2007-05-162007-05-162007-05-16200510.1109/IEDM.2005.1609384https://infoscience.epfl.ch/handle/20.500.14299/6923WOS:000236225100247Suspended-Gate MOSFET: bringing new MEMS functionality into solid-state MOS transistortext::conference output::conference proceedings::conference paper