Herzig, Hans PeterCosentino, Armando2013-08-132013-08-13201310.5075/epfl-thesis-5619https://infoscience.epfl.ch/handle/20.500.14299/94068urn:nbn:ch:bel-epfl-thesis5619-9enoptical sensorrefractive index based deviceguided-wave opticsmetallic nanostructureFabry-PĂ©rot resonancemicrofabricationnanofabricationcharacterizationcavitySlot waveguide cavity : from fabrication to characterization and sensing applicationsthesis::doctoral thesis