Van De Burgt, Y.Champion, A.Bellouard, Yves2015-07-202015-07-202015-07-20201310.1063/1.4821952https://infoscience.epfl.ch/handle/20.500.14299/116417Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures.text::journal::journal article::research article