Mastrangeli, MassimoMartinoli, AlcherioBrugger, Jürgen2013-09-202013-09-202013-09-202013https://infoscience.epfl.ch/handle/20.500.14299/94722self-assemblySU-8electroplatingsurface micromachiningThree-dimensional SU-8 microtiles for fluidic self-assemblytext::conference output::conference paper not in proceedings