Prume, K.Muralt, P.Calame, F.Schmitz-Kempen, T.Tiedke, S.2007-10-182007-10-182007-10-18200710.1109/TUFFC.2007.206https://infoscience.epfl.ch/handle/20.500.14299/13148WOS:00024304270000110091Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devicestext::journal::journal article::research article