Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Graziosi, TMi, SichenKiss, MQuack, Niels2018-11-082018-11-082018-11-08201810.1117/12.2290177https://infoscience.epfl.ch/handle/20.500.14299/150300WOS:000437208300010Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam millingtext::conference output::conference proceedings::conference paper