Yamahata, C.Lacharme, F.Burri, Y.Gijs, M. A. M.2005-10-262005-10-262005-10-26200510.1016/j.snb.2005.01.005https://infoscience.epfl.ch/handle/20.500.14299/218262WOS:000232176500001We present the microfabrication and characterisation of a ball valve micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ the use of a simple powder blasting technology for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The use of a polymer membrane with embedded permanent magnet gives rise to a large actuation stroke, making the micropump bubble-tolerant and self-priming. The micropump exhibits a backpressure as high as 280 mbar and water flow rates up to 5 mL/min thanks to the large magnetic actuation force and the use of high-efficiency ball valves. The frequency-dependent characteristics are in excellent agreement with a hydrodynamic damped oscillator model.ball valvemicropumpglasspowder blastingmagnetic actuationtext::journal::journal article::research article