Rockstuhl, CarstenHerzig, H.P.Förster, ChristianLeycuras, AndréAmbacher, OliverPezoldt, Jörg2009-04-222009-04-222009-04-22200510.4028/www.scientific.net/MSF.483-485.433https://infoscience.epfl.ch/handle/20.500.14299/37980Infrared Gratings Based on SiC/Si-Heterostructurestext::journal::journal article::research article