Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Component

Marxer, C.Grétillat, M.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12199610.1109/LEOSST.1996.540774https://infoscience.epfl.ch/handle/20.500.14299/39579Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Componenttext::conference output::conference proceedings::conference paper