Atomic Force Microscopy Using Cantilevers with Integrated Tips and Piezoelectric Layers for Actuation and Detection

Indermühle, P.-F.Schürmann, G.Racine, G.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12199710.1088/0960-1317/7/3/036https://infoscience.epfl.ch/handle/20.500.14299/39431Atomic Force Microscopy Using Cantilevers with Integrated Tips and Piezoelectric Layers for Actuation and Detectiontext::journal::journal article::research article