Bitterli, R.Overstolz, T.Waldis, S.Stanley, R.Zamkostian, F.Zickar, M.Noell, W.de Rooij, N. F.2009-05-122009-05-122009-05-122007https://infoscience.epfl.ch/handle/20.500.14299/39039Recent Developments in Silicon-based MEMS Photonic Systemstext::conference output::conference proceedings::conference paper