Lozzi, AndreaYen, Ernest Ting TaVillanueva, Guillermo2016-08-262016-08-262016-08-26201610.1109/FCS.2016.7546736https://infoscience.epfl.ch/handle/20.500.14299/128904WOS:000389204500024We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore the quality factor. Also, improvement in, quality factor, can be achieved via acoustic matching between the electrodes and the active piezoelectric layer.Contour Mode Resonatorsfinite element analysisacoustic material matchingperfectly matched layerquality factoranchor losses.text::conference output::conference proceedings::conference paper