Mionic, MarijanaJiguet, SebastienJudelewicz, MosheKarimi, AyatForro, LaszloMagrez, Arnaud2011-12-162011-12-162011-12-16201010.1002/pssb.201000305https://infoscience.epfl.ch/handle/20.500.14299/74827WOS:000285798400103Multiwalled carbon nanotubes (MWCNTs)/SU8 composites have been produced to enhance the mechanical properties of SU8 photoresist. We have studied the influence of SU8 solvent on the structural homogeneity of composites through nano-indentation testing. It is found that acetone and propylene glycol methyl ether acetate (PGMEA) are very suitable solvents to prepare MWCNTs/SU8 composites with significant increase of the Young's modulus (E-Y). The highest increase of E-Y in respect to the parent material of 104% was obtained with acetone as solvent. It was noticed that the remaining solvent in the composite influences strongly E-Y, as well. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, WeinheimepoxyindentationreinforcementfunctionalizationSu8 PhotoresistSu-8NanocompositeMicrofabricationSupporttext::conference output::conference proceedings::conference paper