Paratte, L.de Rooij, N. F.2009-05-122009-05-122009-05-12199410.1016/0924-4247(94)00706-3https://infoscience.epfl.ch/handle/20.500.14299/39671Electrodeposited Electrostatic Rigid-Rotor Wobble Motors on Silicontext::journal::journal article::research article