SAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS

Kim, B JKim, G MLiebau, MHuskens, JReinhoudt, D NBrugger, J2007-03-022007-03-022007-03-022001https://infoscience.epfl.ch/handle/20.500.14299/3362not availableSAMs meet MEMS - surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMStext::conference output::conference poster not in proceedings