Guerin, LouisBossel, M.Demierre, MichelCalmes, S.Renaud, Philippe2005-09-132005-09-13199710.1109/SENSOR.1997.635730https://infoscience.epfl.ch/handle/20.500.14299/216101WOS:A1997BJ35B00350In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastictext::conference output::conference proceedings::conference paper