Santschi, ChTakano, Nvan den Boogaart, M A FGrogg, DDanelon, ChVogel, HBrugger, J2006-02-172006-02-172005https://infoscience.epfl.ch/handle/20.500.14299/224133Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.text::report