Dutta, J.Dorier, J.-L.Howling, A.A.Hollenstein, Ch.Houriet, R.Hofmann, H.2008-05-132008-05-132008-05-131994https://infoscience.epfl.ch/handle/20.500.14299/24326Nano-structured Silicon prepared by plasma dissociation of Silanetext::conference output::conference paper not in proceedings