Tschan, T.de Rooij, N. F.Bezinge, A.2009-05-122009-05-122009-05-12199210.1016/0924-4247(92)80015-Uhttps://infoscience.epfl.ch/handle/20.500.14299/39957Damping of Piezoresistive Silicon Accelerometerstext::journal::journal article::research article