Howell, KaitlinDe Pastina, AnnalisaLozzi, AndreaLarsen, TomFaizan, MuhammadVillanueva, Guillermo2018-02-022018-02-022018-02-022017-07-2710.1109/TRANSDUCERS.2017.7994010https://infoscience.epfl.ch/handle/20.500.14299/144593In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.PiezoelectricNEMSFlexoelectricPZTAlNPiezoelectric Nanoelectromechanical Systemstext::conference output::conference paper not in proceedings