Sambri, A.Gariglio, S.Triscone, J.M.Isarakorn, D.Briand, D.de Rooij, N.F.2010-01-252010-01-252010-01-252009https://infoscience.epfl.ch/handle/20.500.14299/46057Epitaxial Thin Films on Silicon for MEMS devicestext::conference output::conference presentation