Shaker, MarjanSundfor, EFarine, Gaël André LéonSlater, Conor JosephFarine, Pierre-AndréBriand, Danick2018-04-022018-04-022018-04-022017-08-1710.3390/proceedings1040470https://infoscience.epfl.ch/handle/20.500.14299/145859Design, fabrication and optimization of a silicon MEMS natural gas sensortext::conference output::conference proceedings::conference paper