Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

Esfahani, MNKilinc, YKarakan, MCOrhan, EHanay, MSLeblebici, YAlaca, BE2018-11-082018-11-082018-11-08201810.1088/1361-6439/aaab2fhttps://infoscience.epfl.ch/handle/20.500.14299/150782WOS:000425326300001Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOItext::journal::journal article::research article