Nonlinear Frequency Conversion in the Hybrid Silicon Nitride

Churaev, MikhailRiedhauser, AnninaWang, Rui N.Moehl, CharlesSnigirev, ViacheslavHoenl, SimonBlesin, TerenceCaimi, DanieleLiu, JunqiuPopoff, YouriSeidler, PaulKippenberg, Tobias J.2022-09-122022-09-122022-09-122021-01-0110.1364/CLEO_SI.2021.SM4B.1https://infoscience.epfl.ch/handle/20.500.14299/190654WOS:000831479802250We demonstrate optical frequency comb generation in hybrid high-Q optical microresonators fabricated using direct wafer bonding of photonic Damascene silicon nitride wafer with thin-film lithium niobate-on-insulator (LNOI). The devices enable direct phase control via Pockels effect.Engineering, Electrical & ElectronicOpticsPhysics, AppliedEngineeringPhysicsNonlinear Frequency Conversion in the Hybrid Silicon Nitride - Lithium Niobate Integrated Platformtext::conference output::conference proceedings::conference paper