Isarakorn, D.Briand, D.Gariglio, S.Sambri, A.Stucki, N.Triscone, J.-M.Guy, F.Baek, S.-H.Eom, C.-B.Reiner, J. W.Ahn, C. H.de Rooij, N. F.2009-05-122009-05-122009-05-122008https://infoscience.epfl.ch/handle/20.500.14299/39433Establishment of a technology platform for epitaxial piezoelectric MEMStext::conference output::conference proceedings::conference paper