Straessle, R.Pétremand, Y.Briand, D.de Rooij, N. F.2014-04-232014-04-232014-04-23201310.1109/Transducers.2013.6626891https://infoscience.epfl.ch/handle/20.500.14299/102937Leak rate and reliability of low temperature thin-film indium bondingtext::conference output::conference proceedings::conference paper