Zickar, M.Noell, W.Märki, I.Herzig, H. P.Gullo, M.Staufer, U.Imer, R.Guenat, O.Koudelka-Hep, M.de Rooij, N. F.2009-05-122009-05-122009-05-122006https://infoscience.epfl.ch/handle/20.500.14299/40033NEMS Need MEMStext::conference output::conference proceedings::conference paper