Villanueva, G.Rius, G.Montserrat, J.Perez-Murano, F.Bausells, J.2013-08-062013-08-062013-08-06200710.1109/SCED.2007.384029https://infoscience.epfl.ch/handle/20.500.14299/93872Piezoresistive micro cantilevers for Biomolecular force detectiontext::conference output::conference proceedings::conference paper