Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition

Hoffmann, PatrikUtke, IvoCicoira, Fabio2009-07-202009-07-202009-07-20200210.1117/12.510421https://infoscience.epfl.ch/handle/20.500.14299/41741WOS:000184080700002[NRG]Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced depositiontext::conference output::conference proceedings::conference paper