Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation

Dumas, C.Grisolia, J.BenAssayag, G.Bonafos, C.Schamm, S.Arbouet, A.Paillard, V.Van den Boogaart, M.A.F.Brugger, J.Normand, P.2009-03-032009-03-032009-03-032008https://infoscience.epfl.ch/handle/20.500.14299/35741Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantationtext::conference output::conference proceedings::conference paper