Arun, A.Goffman, M. F.Grogg, D.Filoramo, A.Campidelli, S.Derycke, V.Idda, T.Salet, P.Ionescu, A. M.2012-01-092012-01-092012-01-09201010.1109/MEMSYS.2010.5442552https://infoscience.epfl.ch/handle/20.500.14299/76474WOS:000278416400026In this paper we report the first experimental demonstration of Micro-Electro-Mechanical resonator based on a Carbon Nanotube-Array-Suspended-Gate-Field-Effect-Transistor (CNT-SGFET). A dense array of single-walled CNT aligned by ac-dielectrophoresis technique forms the suspended gate electrode of a conventional silicon based FET. Resonance frequency of 120 MHz is reported. An equivalent electrical model has been developed for the resonator.text::conference output::conference proceedings::conference paper