Carazzetti, P.Dubois, M.-A.de Rooij, N. F.2009-05-122009-05-122009-05-12200510.1109/SENSOR.2005.1496644https://infoscience.epfl.ch/handle/20.500.14299/39141High-Performance Micromachined RF Planar Inductorstext::conference output::conference proceedings::conference paper