Staufer, U.Kunzi, P.-A.Gautsch, S.Aeschimann, L.Gullo, M.de Rooij, N. F.2009-05-122009-05-122009-05-122004https://infoscience.epfl.ch/handle/20.500.14299/39890Sample preparation by means of electron beam lithographytext::conference output::conference proceedings::conference paper