Cosentino, ArmandoTan, QingRoussey, MatthieuHerzig, Hans Peter2011-09-272011-09-272011-09-272011https://infoscience.epfl.ch/handle/20.500.14299/71137We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as E-Beam Lithography (EBL) and lift-off [1]. We propose here to study the simulation, fabrication and characterization of such structures at the telecom wavelength (λ=1.55 μm).E-Beam LithographySlot waveguide cavity SWCtext::conference output::conference paper not in proceedings