Combination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surface

Lisunova, Y.Brugger, J.2018-07-032018-07-032018-06-0510.1016/j.mee.2018.02.012https://infoscience.epfl.ch/handle/20.500.14299/1470903D nanopatternsThermal scanning probe lithographyIon beam etchingDry etchingSurface roughnessCombination of thermal scanning probe lithography and ion etching to fabricate 3D silicon nanopatterns with extremely smooth surfacetext::journal::journal article::research article