Linder, C.de Rooij, N. F.2009-05-122009-05-122009-05-12199010.1016/0924-4247(90)87088-Zhttps://infoscience.epfl.ch/handle/20.500.14299/39546Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducerstext::journal::journal article::research article