Cadarso, V. J.Llobera, A.Villanueva, G.Seidemann, V.Buttgenbach, S.Plaza, J. A.2013-08-062013-08-062013-08-06200810.1016/j.sna.2007.11.007https://infoscience.epfl.ch/handle/20.500.14299/93801WOS:000257519100022This paper presents the design, fabrication and characterization of polymer microoptoelectromechanical systems (MOEMS). An optical accelerometer and a variable optical attenuator (VOA) based on SU-8 are presented. Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. Self-alignment structures for fast and accurate fiber optic positioning have also been implemented in both devices. The accelerometer working principle consists on a misalignment between the three waveguides, which comprise the structure, as acceleration is applied. Experimental optical sensitivities of 13.1 dB/g for negative and 17.5 dB/g for positive accelerations, and a high repeatability in an uncontrolled atmosphere are observed. Using the same devices and taking advantage of the high thermal expansion (CTE) of the SU-8, it is possible to obtain a low-power consumption VOA. Experimental results show an attenuation of 20 dB for a power consumption of 12mW. (c) 2007 Elsevier B.V. All rights reserved.microoptomechanical systems (moems)polymer technologysu-8optical accelerometerselectrothermal actuatorsvariable optical attermators (voa)embedded micro-channelswave-guidesiliconfabricationphotoresisttechnologytext::journal::journal article::research article