Thomet, Jonathan2024-03-142024-03-142024-03-142023-09-1410.5075/epfl-PV-LAB-309573https://infoscience.epfl.ch/handle/20.500.14299/206118Raw experimental data sorted by toolenInGaN PECVDPV applicationsPECVD System Bdatasetea730916-e32f-4b3b-a79d-1ac0b076fd72