Pétremand, Y.Noell, W.Clerc, P.-A.Imhof, A.Epitaux, M.Verdiell, M.de Rooij, N. F.2009-05-122009-05-122009-05-122004https://infoscience.epfl.ch/handle/20.500.14299/39683Novel 2D MEMS based Optical Beamsteerertext::conference output::conference proceedings::conference paper