Abelé, N.Pott, V.Boucart, K.Casset, F.Séguéni, K.Ancey, P.Ionescu, A. M.2007-05-162007-05-162007-05-162005https://infoscience.epfl.ch/handle/20.500.14299/6924Electro-Mechanical Modeling of MEMS Resonators with MOSFET detectiontext::conference output::conference proceedings::conference paper