Völkel, R.Herzig, H. P.Nussbaum, Ph.Singer, W.Dändliker, R.Hugle, W.B.2009-04-222009-04-222009-04-22199610.1016/0167-9317(95)00205-7https://infoscience.epfl.ch/handle/20.500.14299/37693Microlens Lithography: A new approach for large display fabricationtext::journal::journal article::research article