Tan, QingCosentino, ArmandoRoussey, MatthieuHerzig, Hans Peter2011-09-272011-09-272011-09-27201110.1109/OMEMS.2011.6031099https://infoscience.epfl.ch/handle/20.500.14299/71138WOS:000297850100011The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).enmetallic slot arraytext::conference output::conference proceedings::conference paper