Photoplastic shadow-masks for rapid resistless multi-layer micropatterning

Kim, G MKim, B JBrugger, J2007-04-132007-04-132007-04-13200110.1007/978-3-642-59497-7_379https://infoscience.epfl.ch/handle/20.500.14299/4642not availablePhotoplastic shadow-masks for rapid resistless multi-layer micropatterningtext::conference output::conference proceedings::conference paper