High-resolution microscopy and photolithography devices using focusing micromirrors

Rachet, BastienMerenda, FabriceSalathe, Rene2015-09-222015-09-222015-09-222010https://infoscience.epfl.ch/handle/20.500.14299/118397The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors.High-resolution microscopy and photolithography devices using focusing micromirrorspatentEP2389606US2016091799US9075227US2011300490EP2389606WO2010084478WO201008447842145093