Völkel, R.Herzig, H. P.Nussbaum, Ph.Singer, W.Weible, K. J.Dändliker, R.Hugle, W.B.2009-04-222009-04-222009-04-221995https://infoscience.epfl.ch/handle/20.500.14299/37645Microlens lithography: a new fabrication Method for very large displaystext::conference output::conference proceedings::conference paper